Process for Proton Exchanged Waveguide
- Published:
- 01/26/2010
- Last Updated:
- 01/26/2010
- Patent Number:
- US 6,185,355 B1
Process for making high yield, DC stable proton exchanged waveguide for active integrated Optic Devices
Patent Overview
A process for greatly improving the DC drift problem associated with LiNbO? and LiTaO? substrates. The process immerses the substrates in a heat bath comprised of a strong acid and then subjects the substrates to cyclical annealing.